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6621 Fleetwood Drive
Suite 113 - 117
Raleigh, NC 27612 USA
Phone (919) 789-0777
www.udmsystems.com
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UDM Systems L300-01 Dicing Lubricant
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Reduction of both electrostatic buildup and sawdust surface contamination are essential in today's die
separation of ultra thin semiconductor materials (mobile communication ICs, CCDs and CMOS image sensors).
The L series lubricants are specifically designed to reduce electrostatic buildup, enhance lubrication,
enabling sawdust dispersion and cleaner bonding pads. L Series lubricants are biodegradable, noncorrosive
aqueous solutions and are completely water soluble.
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UDM Systems® - L300 Series cleaning solution provide the performance and the capabilities needed for
processing wafers with various technologies, which includes 90 nm, 65 nm and the upcoming 45 nm technology
node. UDM- L series products are specifically formulated with high performance dispersants and wetting agents
to reduce water surface tension and eliminate wafer surface ionic contamination.
Highly effective for die separating delicate III-V materials devices.
Excellent for eliminating wafer surface ionic contamination.
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Unique Features
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- Effectively reduces the surface tension of water
- Outstanding wetting properties and excellent rinseability
- Increases die yield and reliability
- Odor free
- Biodegradable, non-hazardous and hence easily disposable
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Applications for L300 Series Cleaning solutions
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Wafer Dicing @ 65-72 deg F
DI Water: L Series ratio
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Mask & Wafer Scrubbing @ 65-72 deg F
DI Water: L Series ratio
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Si, GaAs, InP, Silicon Germanium, Ceramics
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200:1 - 1500:1
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200:1 - 1500:1
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SiC, Sapphire, Ferrite materials, Alumina, Glass
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200:1 - 1500:1
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200:1 - 1500:1
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Description - L300 Coolant / Lubricant applications include wafer
slicing and dicing, and mask and wafer scrubbing. This biodegradable and non corrosive aqueous solution
is ideal for reducing electrostatic buildup and enhancing lubrication enabling sawdust dispersion
therefore yielding cleaner bonding pads.
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UDM L300-01-01 N2000 (1 Gallon)
UDM L300-01-05 N2000 (5 Gallon Pail)
UDM L300-01-55 N2000 (55 Gallon Drum)
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